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Identification and quantification of ionic contamination by Ion Chromatography (IC) Test on metal parts, cleanroom gloves / finger cots, plastic trays, plastic bags, cleanroom wipes and etc.
Anion Test included:
F-, CI-, NO3-, NO4-, Br -, PO43-, SO42-
Cation Test included:
Li+, K+, Na+, NH4+, Ca2+, Mg2+
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